MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications

MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications. This thesis explores the employment of monocrystalline silicon in microsystems as an active material for different thermal functions, such as heat generation and heat transfer by conduction. In addition to theoretical and experimental study on temperature dependence of resistivity of differently doped silicon layers, three devices are presented in this thesis: - mono-Si hotplate micro-heater for high temperatures up, - micro-evaporator that can be used for cooling of electronics or chemical microsystems - miniaturized resistojet thruster for fine attitude control of small satellites

M. Mihailovic

29-6-2011 12:30:00